HFM-D-300A / HFC-D-302A
All Metal, Fast Response, Tight Accuracy!
Mass flow techniques provide RELIABLE, REPEATABLE AND ACCURATE gas flow rate measurements.
HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.
Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.
Features
| Range | 0 – 5 sccm to 0 – 25 slm (N2) |
| Accuracy | + (0.5% of reading + 0.2% of full scale) |
| Repeatability | + 0.15% of F.S. |
| Maximum Working Pressure | 500 PSIG (Optional 1000 PSIG) |
| Settling Time | Typically <1 seconds |
| Analog I/O (Standard) | 0 – 5 VDC |
| Analog I/O (Optional) | 0 – 10 VDC, 0 – 20 mA, 4 – 20 mA |
| Digital I/O (Standard) | RS-232, RS-485 |
| Analog Connector | 15-pin subminiature D |
| Digital Connector | Dual RJ-12 |
| Power Requirements | 11 – 36 VDC |
| Wetted Materials | 316L SS, Nickel 200, 304 SS, 302 SS |